Name		Name	Last commit message	Last commit date
ANSYS		ANSYS
BOSCH		BOSCH
1992-09-29_Si-Membranen-Modalanalyse.pdf		1992-09-29_Si-Membranen-Modalanalyse.pdf
README.md		README.md

Repository files navigation

BIMORPH

MEMS

MEMS microactuator based on silicon diaphragm with piezoceramic (PZT)
Material properties via BIMORPH.MAT
piezo-electric BIMORPH microactuator

Further information

About

BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator

bimorph fem finite-element-analysis finite-element-methods finite-elements mems microactuator piezo piezoelectric-sensors resonant-frequency sensor silicon simulation verification

2 stars

1 watching

Report repository

Releases

Packages

Contributors

Languages